SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, California, USA (Sunday 3 August 2003)] Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies - Advanced industrial fluorescence metrology used for qualification of high quality optical materials
Engel, Axel, Duparre, Angela, Singh, Bhanwar, Becker, Hans-Juergen, Sohr, Oliver, Haspel, Rainer, Rupertus, VolkerVolume:
5188
Year:
2003
Language:
english
DOI:
10.1117/12.506814
File:
PDF, 486 KB
english, 2003