![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer Optics for Advanced X-Ray Applications - Reflection masks for soft x-ray projection lithography
Hawryluk, Andrew M., Ceglio, Natale M., Phillion, D. W., Gaines, David P., Browning, Raymond, Pease, Roger Fabian W., Stewart, Diane K., Economou, Nicholas P., Ceglio, Natale M.Volume:
1547
Year:
1992
Language:
english
DOI:
10.1117/12.51273
File:
PDF, 428 KB
english, 1992