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SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Device and Process Technologies for MEMS, Microelectronics, and Photonics III - Quantum electro-mechanical systems (QEMS)
Chiao, Jung-Chih, Utami, Dian W., Goan, Hsi-Sheng, Hariz, Alex J., Jamieson, David N., Milburn, Gerard J., Parish, Giacinta, Varadan, Vijay K.Volume:
5276
Year:
2003
Language:
english
DOI:
10.1117/12.522241
File:
PDF, 646 KB
english, 2003