SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Photonics: Design, Technology, and Packaging - ICP etching of InP and its applications in photonic circuits
Karouta, Fouad, Jagadish, Chennupati, Choquette, Kent D., Zhu, Yucai C., Geluk, Erik Jan, Eggleton, Benjamin J., Nener, Brett D., van der Tol, Jos J. G. M., Binsma, J. J. M., Nugent, Keith A., Smit, MVolume:
5277
Year:
2003
Language:
english
DOI:
10.1117/12.530339
File:
PDF, 686 KB
english, 2003