SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 14 March 2004)] Smart Structures and Materials 2004: Smart Sensor Technology and Measurement Systems - Interferometric sensor and calibration system for high-precision applications
Welter, Matthias, Udd, Eric, Inaudi, Daniele, Manske, Eberhard, Jaeger, GerdVolume:
5384
Year:
2004
Language:
english
DOI:
10.1117/12.538913
File:
PDF, 1.37 MB
english, 2004