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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] MEMS, MOEMS, and Micromachining - Design and fabrication of a circular digital variable optical attenuator
Sun, Winston, Urey, Hakan, El-Fatatry, Ayman, Mughal, Junaid, Perez, Frank, Riza, Nabeel A., Noell, Wilfried, de Rooij, Nicolaas F.Volume:
5455
Year:
2004
Language:
english
DOI:
10.1117/12.544997
File:
PDF, 4.66 MB
english, 2004