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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Recent advances in the development of coherent and incoherent UV and EUV discharge sources
Borisov, Vladimir M., Demin, Andrei I., Eltzov, A., Ivanov, Alexander S., Khristoforov, Oleg B., Kirykhin, Yuriy B., Vinokhodov, Aleksandr Y., Vodchits, V. A., Mischenko, Valentin A., Prokofiev, AlexaYear:
2012
Language:
english
DOI:
10.1117/12.558204
File:
PDF, 662 KB
english, 2012