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SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Nanoengineering: Fabrication, Properties, Optics, and Devices - Nanostructured diffractive optical elements on SiN X membrane for UV-visible regime applications
Lee, Chien Chieh, Dobisz, Elizabeth A., Eldada, Louay A., Wang, Chih Ming, Xu, Che Lung, Chen, Jing Yi, Chang, Jenq Yang, Liao, Yi Ming, Chi, Gou ChungVolume:
5515
Year:
2004
Language:
english
DOI:
10.1117/12.559296
File:
PDF, 161 KB
english, 2004