SPIE Proceedings [SPIE 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Dresden, Germany (Monday 12 January 2004)] 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Determining the transfer function of a mask fabrication process
Leunissen, Peter L. H. A., Philipsen, Vicky, Jonckheere, Rik M.Volume:
5504
Year:
2004
Language:
english
DOI:
10.1117/12.568023
File:
PDF, 730 KB
english, 2004