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SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Interferometry XII: Applications - Evaluation of the mechanical properties of square membranes prestressed by PECVD silicon oxynitride thin films
Jozwik, Michal, Osten, Wolfgang, Novak, Erik, Gorecki, Christophe, Delobelle, Patrick, Sabac, Andrei, Kujawinska, MalgorzataVolume:
5532
Year:
2004
Language:
english
DOI:
10.1117/12.569806
File:
PDF, 703 KB
english, 2004