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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Micromachining and Microfabrication Process Technology X - Fabrication of three-dimensional photonic devices using femtosecond laser pulses
Sohn, Ik-Bu, Maher, Mary-Ann, Stewart, Harold D., Lee, Man-Seop, Lee, Sang-Man, Woo, Jung-Sik, Jung, Jung-YongVolume:
5715
Year:
2005
Language:
english
DOI:
10.1117/12.588501
File:
PDF, 161 KB
english, 2005