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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Micromachining Technology for Micro-Optics and Nano-Optics III - Improved fabrication accuracy of Bragg gratings
Brown, Jeremiah D., Johnson, Eric G., Nordin, Gregory P., Mehta, Alok, Hockel, Heidi, Suleski, Thomas J., Johnson, Eric G.Volume:
5720
Year:
2005
Language:
english
DOI:
10.1117/12.594382
File:
PDF, 615 KB
english, 2005