SPIE Proceedings [SPIE Micro - DL Tentative - San Jose, CA (Sunday 1 March 1992)] Integrated Circuit Metrology, Inspection, and Process Control VI - Correlation of 150-mm silicon wafer site flatness with stepper performance for deep submicron applications
Huff, Howard R., Vigil, Joseph C., Kuyel, Birol, Chan, David Y., Nguyen, Long P., Postek, Jr., Michael T.Volume:
1673
Year:
1992
Language:
english
DOI:
10.1117/12.59805
File:
PDF, 545 KB
english, 1992