SPIE Proceedings [SPIE Photomask Technology 2005 - Monterey, California (Monday 3 October 2005)] 25th Annual BACUS Symposium on Photomask Technology - Improved file sizes and cycle times through optimization of GDSII stream
Le, Chin, Weed, J. Tracy, Martin, Patrick M., Gariepy, DavidVolume:
5992
Year:
2005
Language:
english
DOI:
10.1117/12.631780
File:
PDF, 192 KB
english, 2005