SPIE Proceedings [SPIE Optics East 2005 - Boston, MA (Sunday 23 October 2005)] Nanofabrication: Technologies, Devices, and Applications II - Process control and material properties of thin electroless Co-based capping layers for copper interconnects
Petrov, Nicolai, Lai, Warren Y., Ocola, Leonidas E., Valverde, Charles, Chen, Qingyun, Pau, Stanley, Xu, Chen, Paneccasio, Vincent, Stritch, Daniel, Witt, Christian, Walker, Elizabeth, Barnes, Jeff, PVolume:
6002
Year:
2005
Language:
english
DOI:
10.1117/12.632504
File:
PDF, 1.25 MB
english, 2005