SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Brisbane, Australia (Sunday 11 December 2005)] Device and Process Technologies for Microelectronics, MEMS, and Photonics IV - Thermal and mechanical responses of the thermomechanical microprobe for high-density storage technology
Chiao, Jung-Chih, Lin, Chun-Te, Chiang, Kuo-Ning, Dzurak, Andrew S., Jagadish, Chennupati, Thiel, David V.Volume:
6037
Year:
2005
Language:
english
DOI:
10.1117/12.638562
File:
PDF, 497 KB
english, 2005