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SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] MOEMS Display, Imaging, and Miniaturized Microsystems IV - Optical characterization of 9x9 optical cross connect utilizing silicon lens scanners with spider-leg actuators
Kwon, Ho Nam, Ürey, Hakan, Dickensheets, David L., Lee, Jong-Hyun, Takahashi, Kazuhiro, Gogoi, Bishnu P., Toshiyoshi, HiroshiVolume:
6114
Year:
2006
Language:
english
DOI:
10.1117/12.645631
File:
PDF, 1.04 MB
english, 2006