SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] MEMS/MOEMS Components and Their Applications III - Characterization of contour shapes achievable with a MEMS deformable mirror
Zhou, Yaopeng, Olivier, Scot S., Tadigadapa, Srinivas A., Bifano, Thomas, Henning, Albert K.Volume:
6113
Year:
2006
Language:
english
DOI:
10.1117/12.651924
File:
PDF, 405 KB
english, 2006