SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V - A transient charging model to predict actuation-voltage shift in RF-MEMS capacitive switches
Yuan, Xiaobin, Tanner, Danelle M., Ramesham, Rajeshuni, Hwang, James C. M., Forehand, David, Goldsmith, Charles L.Volume:
6111
Year:
2006
Language:
english
DOI:
10.1117/12.657691
File:
PDF, 292 KB
english, 2006