SPIE Proceedings [SPIE Smart Materials, Nano- and Micro-Smart Systems - Adelaide, Australia (Sunday 10 December 2006)] Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III - Fabrication of inexpensive metallic mould for nanoimprinting using colloidal monolayer as a nanomask
Chiao, Jung-Chih, Ashraf, Mohammed, Anoop, Sreenath, Dzurak, Andrew S., Jagadish, Chennupati, Chollet, Franck, Thiel, David V.Volume:
6415
Year:
2006
Language:
english
DOI:
10.1117/12.695807
File:
PDF, 857 KB
english, 2006