SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Metrology, Inspection, and Process Control for Microlithography XXI - Image simulation and surface reconstruction of undercut features in atomic force microscopy
Qian, Xiaoping, Archie, Chas N., Villarrubia, John, Tian, Fenglei, Dixson, RonaldVolume:
6518
Year:
2007
Language:
english
DOI:
10.1117/12.712399
File:
PDF, 740 KB
english, 2007