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SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Optical Microlithography XX - Hyper NA polarized imaging of 45nm DRAM
Lim, Chang-Moon, Flagello, Donis G., Park, Sarohan, Hyun, Yoon-Suk, Kim, Jin-Soo, Eom, Tae-Seung, Park, Jun-Taek, Moon, Seung-Chan, Kim, Jin-WoongVolume:
6520
Year:
2007
Language:
english
DOI:
10.1117/12.712442
File:
PDF, 1.19 MB
english, 2007