SPIE Proceedings [SPIE 27th International congress on High-Speed Photography and Photonics - Xi'an, China (Sunday 17 September 2006)] 27th International Congress on High-Speed Photography and Photonics - Research on surface topography of MEMS micromirror based on 3D Weierstrass-Mandelbrot function
Luo, Yuan, Hou, Xun, Zhao, Wei, Zhang, Yi, Xu, Xiaodong, Yao, BaoliVolume:
6279
Year:
2006
Language:
english
DOI:
10.1117/12.725945
File:
PDF, 399 KB
english, 2006