![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 26 August 2007)] Advances in Metrology for X-Ray and EUV Optics II - A microstitching interferometer for evaluating the surface profile of precisely figured x-ray K-B mirrors
Assoufid, Lahsen, Assoufid, Lahsen, Takacs, Peter Z., Qian, Jun, Kewish, Cameron M., Ohtsuka, Masaru, Liu, Chian, Conley, Ray, Macrander, Albert T., Lindley, Delvin, Saxer, ChristopherVolume:
6704
Year:
2007
Language:
english
DOI:
10.1117/12.736384
File:
PDF, 1.48 MB
english, 2007