SPIE Proceedings [SPIE 27th Annual BACUS Symposium on Photomask Technology - Monterey, CA (Monday 17 September 2007)] Photomask Technology 2007 - Accuracy of mask pattern contour extraction with fine-pixel SEM images
Yamaguchi, Shinji, Naber, Robert J., Kawahira, Hiroichi, Yamanaka, Eiji, Mukai, Hidefumi, Kotani, Toshiya, Mashita, Hiromitsu, Itoh, MasamitsuVolume:
6730
Year:
2007
Language:
english
DOI:
10.1117/12.747866
File:
PDF, 1.27 MB
english, 2007