SPIE Proceedings [SPIE Photonics Asia 2007 - Beijing, China (Sunday 11 November 2007)] Quantum Optics, Optical Data Storage, and Advanced Microlithography - The contact hole solutions for future logic technology nodes
Guo, Guangcan, Chen, Alek, Hansen, Steve, Liu, Songhao, Jin, Guofan, Moers, Marco, Shieh, Jason, Schouhamer Immink, Kees A., Shono, Keiji, Engelen, Andre, van Ingen Schenau, Koen, Mack, Chris A., KangVolume:
6827
Year:
2007
Language:
english
DOI:
10.1117/12.760197
File:
PDF, 911 KB
english, 2007