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SPIE Proceedings [SPIE 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - Chengdu, China (Sunday 8 July 2007)] 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - Design of a new MEMS-based tunable grating with electrostatic comb drive
Yu, Yiting, Yuan, Weizheng, Xu, Jinghui, Han, Sen, Xing, Tingwen, Li, Yanqiu, Cui, ZhengVolume:
6724
Year:
2007
Language:
english
DOI:
10.1117/12.782857
File:
PDF, 408 KB
english, 2007