SPIE Proceedings [SPIE Asia Pacific Optical Communications - Hangzhou, China (Sunday 26 October 2008)] Optoelectronic Materials and Devices III - Inductively coupled plasma etching of In 1-x-y Al x Ga y As in BCl 3 /Cl 2 /Ar
Ning, Jinhua, Luo, Yi, Buus, Jens, Zhang, Kefeng, Tang, Hengjing, Koyama, Fumio, Lo, Yu-Hwa, Wang, Yang, Li, Xue, Gong, Hai-meiVolume:
7135
Year:
2008
Language:
english
DOI:
10.1117/12.803196
File:
PDF, 368 KB
english, 2008