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SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, CA (Sunday 2 August 2009)] Instrumentation, Metrology, and Standards for Nanomanufacturing III - High-performance multi-channel fiber-based absolute distance measuring interferometer system
Deck, Leslie L., Postek, Michael T., Allgair, John A.Volume:
7405
Year:
2009
Language:
english
DOI:
10.1117/12.826253
File:
PDF, 553 KB
english, 2009