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SPIE Proceedings [SPIE SPIE Optics + Optoelectronics - Prague, Czech Republic (Monday 18 April 2011)] Damage to VUV, EUV, and X-ray Optics III - Thermal stability on Mo/B 4 C multilayers
Barthelmess, Miriam, Juha, Libor, Bajt, Saša, Bajt, Saša, London, Richard A.Volume:
8077
Year:
2011
Language:
english
DOI:
10.1117/12.886751
File:
PDF, 3.86 MB
english, 2011