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SPIE Proceedings [SPIE Medical Imaging II - Newport Beach, CA (Sunday 31 January 1988)] Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII - Hybrid Device Process Using A Focused Ion Beam And An Optical Stepper
Ochiai, Yukinori, Kojima, Yoshikatsu, Matsui, Shinji, Mochizuki, Akira, Yamauchi, Masamitsu, Yanof, Arnold W.Volume:
923
Year:
1988
Language:
english
DOI:
10.1117/12.945639
File:
PDF, 5.34 MB
english, 1988