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SPIE Proceedings [SPIE SPIE'S 1993 Symposium on Microlithography - San Jose, CA (Sunday 28 February 1993)] Optical/Laser Microlithography - New mask technique for optical lithography--dummy diffraction mask
Oh, Yong-Ho, Yoo, Hyung Joun, Park, Byung-Sun, Cha, Zion, Kim, Hyo-Joong, Jeon, Young Jin, Cuthbert, John D.Volume:
1927
Year:
1993
Language:
english
DOI:
10.1117/12.150425
File:
PDF, 491 KB
english, 1993