SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Manufacturing Process Control for Microelectronic Devices and Circuits - Thin film and surface layer processes forming control using electron emission
Dekhtyar, Yuri, Kunitzin, A., Noskov, Vladimir, Sabnis, Anant G.Volume:
2336
Year:
1994
Language:
english
DOI:
10.1117/12.186785
File:
PDF, 248 KB
english, 1994