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SPIE Proceedings [SPIE International Symposium on Precision Engineering Measurement and Instrumentation 2012 - Chengdu, China (Wednesday 8 August 2012)] Eighth International Symposium on Precision Engineering Measurement and Instrumentation - Characterization of nanoline based on SEM images

Wang, Chen-ying, Yang, Shu-ming, Lin, Qi-jing, Jiang, Zhuang-de, Lin, Jie
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Volume:
8759
Year:
2013
Language:
english
DOI:
10.1117/12.2014506
File:
PDF, 294 KB
english, 2013
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