SPIE Proceedings [SPIE International Conference on Optical Instruments and Technology (OIT2013) - Beijing, China (Sunday 17 November 2013)] 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication - Reactive ion etching and OES endpoint detection of AlCu thin film
Gou, Jun, Tai, Hui Ling, Wang, Jun, Wei, Xiong Bang, Jiang, Ya Dong, Zhou, Zhiping, Zhou, ChangheVolume:
9047
Year:
2013
Language:
english
DOI:
10.1117/12.2042642
File:
PDF, 233 KB
english, 2013