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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachined Devices and Components - Characterization of a surface micromachined pressure sensor array
Eaton, William P., Smith, James H., Roop, Ray M., Chau, Kevin H.Volume:
2642
Year:
1995
Language:
english
DOI:
10.1117/12.221177
File:
PDF, 423 KB
english, 1995