SPIE Proceedings [SPIE San Dieg - DL Tentative - San Diego, CA (Sunday 1 July 1990)] X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography - Soft x-ray projection lithography: experiments and practical printers
White, Donald L., Bjorkholm, John E., Bokor, Jeffrey, Eichner, Ludwig, Freeman, Richard R., Gregus, Jeffrey A., Jewell, Tanya E., Mansfield, William M., MacDowell, Alastair A., Raab, Eric L., SilfvastVolume:
1343
Year:
1991
Language:
english
DOI:
10.1117/12.23193
File:
PDF, 1.08 MB
english, 1991