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SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachined Devices and Components II - Performance trade-offs for a surface micromachined microengine
Miller, Samuel L., Sniegowski, Jeffry J., LaVigne, Glen, McWhorter, Paul J., Chau, Kevin H., Roop, Ray M.Volume:
2882
Year:
1996
Language:
english
DOI:
10.1117/12.250702
File:
PDF, 2.56 MB
english, 1996