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SPIE Proceedings [SPIE Santa Cl - DL tentative - Santa Clara, CA (Saturday 15 September 1990)] Rapid Thermal and Related Processing Techniques - Rapid thermal annealing of the through-Ta5Si3 film implantation on GaAs
Huang, Fon-Shan, Chen, W. S., Hsu, Tzu-min, Singh, Rajendra, Moslehi, Mehrdad M.Volume:
1393
Year:
1991
Language:
english
DOI:
10.1117/12.25702
File:
PDF, 233 KB
english, 1991