SPIE Proceedings [SPIE Microlithography '97 - Santa Clara,...

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SPIE Proceedings [SPIE Microlithography '97 - Santa Clara, CA (Monday 10 March 1997)] Optical Microlithography X - Optical microlithography with nearly nondiffracting beams

Erdelyi, Miklos, Horvath, Zoltan L., Bor, Zsolt, Szabo, Gabor, Cavallaro, Joseph R., Smayling, Michael C., Tittel, Frank K., Fuller, Gene E.
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Volume:
3051
Year:
1997
Language:
english
DOI:
10.1117/12.276053
File:
PDF, 847 KB
english, 1997
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