![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachining and Microfabrication Process Technology IV - Selective deep-Si-trench etching with dimensional control
Shul, Randy J., Willison, Christi L., Zhang, Lei, Smith, James H.Volume:
3511
Year:
1998
Language:
english
DOI:
10.1117/12.324308
File:
PDF, 3.02 MB
english, 1998