SPIE Proceedings [SPIE 15th European Conference on Mask Technology for Integrated Circuits and Micro-Components - Munich, Germany (Monday 16 November 1998)] 15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 - Hierarchical mask data preparation and special fracturing techniques in MGS
Buerger, B., Baetz, Uwe, Kunze, Klaus-Dietmar, Wolf, H., Behringer, Uwe F. W.Volume:
3665
Year:
1999
Language:
english
DOI:
10.1117/12.346217
File:
PDF, 48 KB
english, 1999