SPIE Proceedings [SPIE International Conference on Optical Metrology - Pultusk Castle, Poland (Wednesday 20 October 1999)] Interferometry '99: Applications - Fabrication and metrology of km-scale radii on surfaces of master tooling
Leistner, Achim J., Oreb, Bozenko F., Seckold, Jeffrey A., Walsh, Christopher J., Jueptner, Werner P. O., Patorski, KrzysztofVolume:
3745
Year:
1999
Language:
english
DOI:
10.1117/12.357762
File:
PDF, 1.85 MB
english, 1999