SPIE Proceedings [SPIE Industrial Lasers and Inspection (EUROPTO Series) - Munich, Germany (Monday 14 June 1999)] Microsystems Metrology and Inspection - Investigation of heat transfer in micromirrors
Kehr, Kersten, Kurth, Steffen, Mehner, Jan, Doetzel, Wolfram, Gessner, Thomas, Gorecki, ChristopheVolume:
3825
Year:
1999
Language:
english
DOI:
10.1117/12.364300
File:
PDF, 1.53 MB
english, 1999