SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Design, Characterization, and Packaging for MEMS and Microelectronics - X-Y nanopositioners using high-density arrays of mechanical oscillators
Bourbon, Gilles, Minotti, Patrice, Helin, Philippe, Fujita, Hiroyuki, Courtois, Bernard, Demidenko, Serge N.Volume:
3893
Year:
1999
Language:
english
DOI:
10.1117/12.368463
File:
PDF, 4.31 MB
english, 1999