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SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Monday 18 September 2000)] Challenges in Process Integration and Device Technology - Prospective technology for system-on-a-chip: N2 implant followed by VHP O2 reoxidation
Luo, Tien-Ying, Al-Shareef, Husam N., Brown, George A., Watt, Victor H. C., Karamcheti, Arun, Jackson, Mike D., Huff, Howard R., Evans, Bob, Lee, Chongmok, Luan, Hong-Fa, Kwong, Dim-Lee, Burnett, DaviVolume:
4181
Year:
2000
Language:
english
DOI:
10.1117/12.395738
File:
PDF, 278 KB
english, 2000