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SPIE Proceedings [SPIE International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 27 November 2000)] Microlithographic Techniques in Integrated Circuit Fabrication II - Overview of reticle enhancement technology software strategy
Reich, Alfred J., Jarvis, R. D., Talent, Steve, Carter, Renee, Mack, Chris A., Yuan, XiaoCongVolume:
4226
Year:
2000
Language:
english
DOI:
10.1117/12.404842
File:
PDF, 304 KB
english, 2000