SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Optical Manufacturing and Testing IV - Fabrication of integrated diffractive micro-optics for MEMS applications
Senesac, Larry R., Farahi, R. H., Corbeil, James L., Earl, Dennis D., Rajic, Slobodan, Datskos, Panos G., Stahl, H. PhilipVolume:
4451
Year:
2001
Language:
english
DOI:
10.1117/12.453628
File:
PDF, 882 KB
english, 2001