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SPIE Proceedings [SPIE Symposium on Integrated Optoelectronic Devices - San Jose, CA (Friday 18 January 2002)] Silicon-based and Hybrid Optoelectronics IV - Fabrication of aperiodic gratings on silicon-on-insulator (SOI) rib waveguides using e-beam lithography
Subramanian, Venkat R., DeCorby, Ray G., McMullin, James N., Haugen, Chris J., Belov, Miroslav, Robbins, David J., Jabbour, Ghassan E.Volume:
4654
Year:
2002
Language:
english
DOI:
10.1117/12.463856
File:
PDF, 3.33 MB
english, 2002