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SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - Development of position sensors for macro- and microelectronic devices
Harvey, Alan L., Qin, Liquian, Kadri, Ashraf, Zmood, Ron, Sood, Dinesh K., Malshe, Ajay P., Maeda, RyutaroVolume:
4936
Year:
2002
Language:
english
DOI:
10.1117/12.476093
File:
PDF, 40 KB
english, 2002